![]() Han D, Wang J, Yuan S, Yang T, Chen B, Teng G, Luo W, Chen Y, Li Y, Wang M and Yin Y 2019 A Mems Pressure Sensor Based on Double-Ended Tuning Fork Resonator with on-Chip Thermal Compensation. ![]() 21: 22553–22561Īzgin K, Akin T and Valdevit L 2012 Ultrahigh-dynamic-range resonant MEMS load cells for micromechanical test frames. Zhang Q, Li C, Zhao Y and Zhang Z 2021 A Quartz Resonant Ultra-High Pressure Sensor With High Precision and High Stability. Sharma A, Kumar V and Kaur H J 2022 Finite Element Analysis for Design Optimization of MEMS Double Ended Tuning Fork Resonator. ![]() Tai-Ran H 2008 MEMS and Microsystems: Design and Manufacture. ![]() In: AIP Conference Proceedings 2451: 020018 Sharma A, Kumar V and Kaur H J 2022 Analysis of a micro-resonant pressure sensor with docked clamped-clamped micro-beam. Petersen K, Pourahmadi F, Brown J, Parsons P, Skinner M and Tudor J 1991 Resonant beam pressure sensor fabricated with silicon fusion bonding. Lastly, certain simplified design rules for novel micro-DETF resonator designing are also presented.Įffective stiffness of the resonator \(\) This study demonstrates the outcomes of simulations like impact on stress at the fixed ends, impact on the anti-symmetric mode of operation like its position, frequency, and modal interference. The focal point of this study is designing a flexural resonator structure suitable in high frequency design requirements along with improved stress considerations for the resonator design. Resonator modelling is done using the finite element model tool COMSOL and a novel design of the DETF resonator is presented. The boundary organization and geometric framework of the DETF resonator are extensively examined. A systematized evaluation of resonator performance is done through a simulative approach for the basic shapes of DETF resonators found in the literature. In this paper, the object of study is a double-ended-tuning-fork (DETF) resonator which has the inherent advantages of high sensitivity and improved performance. An important consideration for resonator-based structures is to have a great level of balance and stability in the vibrational mode opted for resonator operation. Akad.Micro-resonators are used intensively in various sensors and actuators. Cleland, Foundations of nanomechanics: from solid-state theory to device applications (Springer Berlin, Heidelberg, 2003)ĭ. 366–368, Trans Tech Publications, Switzerland (2001) Gremaud, 684 pages, Materials Science Forum, vol. Gremaud, “Mechanical Spectroscopy, with Applications to Materials Science”, Proceedings of the Summer School Q-1 2001, ed. Sinning, Internal friction in metallic materials: a handbook, Berlin (Springer, Berlin, 2007) Panov, Systems with small dissipation (University of Chicago Press, Chicago, IL, 1985) The quality factor differences between predicted quality factor and measured one indicate that there are specific defects inside the material used as a resonator, which will be useful when the various-frequency tuning forks are employed as a highly sensitive force sensing resonator in the dynamic force microscopy and spectroscopy.Ī. In addition, since the quality factor depends on the mass symmetry of both prongs for the case of a tuning fork-type resonator, we improve the quality factor by matching the position and mass of the displacement-sensing accelerometer and the displacement-inducing actuator. We show that the increase in crystallinity of the 3D printed PLA tuning fork via annealing leads to an increase in quality factor, by which we confirm that the material to be used as a resonator should be with high crystallinity rather than an amorphous state. Resonators of various sizes with a tuning fork shape are realized by metal 3D printing method as well as metal machining process. Metal and ceramic materials such as tantalum, steel, silicon nitride are used as resonator materials for high quality factors with minimal loss of mechanical energy. We demonstrate that the designed and fabricated tuning fork resonators have quality factors of about 10 3–10 4 in the diverse frequency range from 50 Hz to 10 kHz in ambient condition.
0 Comments
Leave a Reply. |
AuthorWrite something about yourself. No need to be fancy, just an overview. ArchivesCategories |